What is epitaxial crystal growth?

Epitaxy refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer.

What is epitaxial growth in IC?

Epitaxial growth is the process used to grow a thin crystalline layer on a crystalline surface (substrate). The substrate wafer acts as seed crystal. In this process , crystal is grown below melting point , which uses an evaporation method.

What is epitaxial structure?

Epitaxial interfaces in solids are a special class of crystalline interfaces where the molecular arrangement of one crystal on top of another is defined by the crystallographic and chemical features of the underlying crystal.

What is epitaxial growth technique?

Epitaxial growth is broadly defined as the condensation of gas precursors to form a film on a substrate. Liquid precursors are also used, although the vapor phase from molecular beams is more in use. Vapor precursors are obtained by CVD and laser ablation.

What is epitaxial deposition?

The term epitaxy comes from the Greek roots epi, meaning “above”, and taxis, meaning “in ordered manner”. Epitaxy refers to the deposition of an overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. The overlayer is called an epitaxial film or epitaxial layer.

Which epitaxial method is mostly used?

There are a number of approaches to vapour phase epitaxy, which is the most common process for epitaxial layer growth. Molecular beam epitaxy provides a pure stream of atomic vapour by thermally heating the constituent source materials.

What is the difference between epitaxial growth and crystal growth?

Single crystal means the one crystal orientation. Epitaxial thin film also exibits single crystal, but the epitaxial thin films are grown with single crystalline nature by lattice match between thin film and substrate.

Which is the best description of epitaxial growth?

Epitaxial growth is a highly controllable method for systematically assembling dissimilar materials into artificial structures with atomic-scale precision (schlom et al., 2008).

Can a nucleating agent be used for epitaxial growth?

Commenting on the matter of selecting a nucleating agent that will form crystalline nuclei suitable for epitaxial overgrowth of a desired phase, the authors stressed that a simple consideration based on similarity of lattice spacing between low-index planes of prospective host and guest lattices is insufficient and can be misleading.

Why is epitaxy important to the science of crystal growth?

Epitaxy provides an essential link between the art and science of crystal growth and manufacturing of devices and circuits with applications in microelectronics, optoelectronics, and photonics. Therefore, continuing expansion of capabilities and the addition of new methods of epitaxy are important.